Multi-probe ferromagnetic resonance (FMR) apparatus for wafer level characterization of magnetic films

ABSTRACT

A ferromagnetic resonance (FMR) measurement system is disclosed with a plurality of “m” RF probes and one or more magnetic assemblies to enable a perpendicular-to-plane or in-plane magnetic field (H ap ) to be applied simultaneously with a sequence of microwave frequencies (f R ) at a plurality of “m” test locations on a magnetic film formed on a whole wafer under test (WUT). A FMR condition occurs in the magnetic film (stack of unpatterned layers or patterned structure) for each pair of (H ap , f R ) values. RF input signals are distributed to the RF probes using RF power distribution or routing devices. RF output signals are transmitted through or reflected from the magnetic film to a plurality of “n” RF diodes where 1≤n≤m, and converted to voltage signals which a controller uses to determine effective anisotropy field, linewidth, damping coefficient, and/or inhomogeneous broadening at the predetermined test locations.

RELATED PATENT APPLICATIONS

This application is related to Ser. No. 15/463,074, filing date Mar. 20,2017; and Ser. No. 15/875,004, filing date Jan. 19, 2018, which areassigned to a common assignee and herein incorporated by reference intheir entirety.

TECHNICAL FIELD

The present disclosure relates to a FMR apparatus for measuring magneticproperties in magnetic films at a plurality of sites on a whole wafer,and a system for doing the same comprised of a magnetic assembly withone or more magnetic field sources, and a plurality of RF probes thatare mounted on a platform to enable multiple sites to be measuredsimultaneously or consecutively without moving the platform relative tothe wafer thereby substantially decreasing the FMR measurement time perwafer.

BACKGROUND

Magnetic thin films and multilayers play a key role in various types ofmagnetic storage devices such as a magnetic hard disk (HDD) drive,Magnetic Random Access Memory (MRAM), spin torque oscillator (STO), andmagnetic domain wall devices. In order to develop and optimize suchdevices, monitoring and characterization of magnetic thin film stacks isessential. A variety of different magnetic characterization techniquesmust be used to determine all the essential magnetic parameters such ascrystalline anisotropy, surface or interface anisotropy, magnetizationsaturation (Ms), damping constant (α), gyromagnetic ratio (γ),inhomogeneous broadening (L₀), resistance x area product (RA), andmagnetoresistive ratio (MR).

FMR techniques are well suited to measure anisotropy fields, as well asthe gyromagnetic ratio γ, and the damping constant α of magnetic filmsand multilayers in extended unpatterned films or over an area comprisinga large array of sub-micron patterned structures. The resonancefrequency f_(R) of a ferromagnetic film is given by the so-called Kittelformula shown in equation (1) below where H_(R) is the resonance fieldapplied perpendicular to the plane of the film, H_(K) is the effectiveanisotropy field which includes structural, surface, and magnetostaticcontributions, and γ is the gyromagnetic ratio.2πf _(R)=γ(H _(R) +H _(K))  (Eq. 1)

A FMR experiment comprises probing the magnetic system (thin film,multilayer stack, or structured device) with a combination of microwaveexcitation and a quasi-static magnetic field. FMR data is obtained byeither sweeping the magnetic field at a constant microwave frequency, orby sweeping the frequency at a constant field. When the ferromagneticresonance condition is achieved, it may be detected by an enhancedabsorption of the microwave (RF signal) by the ferromagnetic sample. Theabsorption is at a maximum at a specific frequency corresponding to theresonance frequency (f_(R)) of the sample where f_(R) depends on thestatic field applied to the sample as well as its magnetic properties.Thus, resonance (FMR) conditions are defined using pairs of magneticfield and microwave frequency values (H_(R), f_(R)).

Although conventional FMR experiments were done by placing a smallsample in a resonant cavity between the poles of an electromagnet,waveguide based techniques, which have been developed during the pastdecade, are especially well suited to analyze film geometry. Inparticular, the wafer under test (WUT) is placed in contact with awaveguide transmission line (WGTL) that may be in the form of a groundedcoplanar waveguide (GCPWG), coplanar waveguide (CPWG), co-axialwaveguide (CWG), stripline (SL), or a microstrip (MS). The WGTL is usedboth to transmit microwaves to the sample, and to detect FMR absorptionas a function of the applied magnetic field and microwave frequency.

Referring to FIG. 1A, a schematic depiction is shown where outputvoltages are plotted as a function of a variable magnetic field atconstant microwave frequency using five different values (f1-f5) ofmicrowave frequency. The center and width of the Lorentzian peaks isextracted from the data as a function of the excitation microwavefrequency. As mentioned previously, the center field is the resonancefield (H_(R)), which is related to the excitation microwave frequencyfollowing the Kittel formula that is rewritten in a slightly differentform in equation (2) below where h is the Planck constant, g is theLande factor and μ_(B) is the Bohr magneton.H _(R)(f)=[h/(g×μ _(B))]×f−H _(K)  (Eq. 2)

The variation of H_(R) with microwave frequency is shown in FIG. 1Bwhere each of the points along curve 21 is derived from one of theLorentzian shaped peaks Hr1-Hr5 in FIG. 1A. As indicated by equation(2), the extrapolation of the data to f=0 gives the value of theeffective anisotropy field H_(K).

The linewidth L of the resonance peak is the width at half amplitude ΔHof the resonance peak and is related to dissipative processes involvedin magnetization dynamics as well as to possible distributions ofdifferent magnetic thin film parameters such as H_(K) or Ms. Thelinewidth depends on the excitation frequency and the dimensionlessGilbert damping constant α according to equation (3) below where L₀ isan inhomogeneous broadening. By fitting H_(R) and L with respect to theexcitation frequency f_(R), H_(K) as well as α, L₀ and g may be derived.L(f)=(2hα/(g×μ _(B)))f+L ₀  (Eq. 3)

A vector network analyzer (VNA) for detecting FMR in thin CoFe and CoFeBfilms on a coplanar waveguide is described by C. Bilzer et al. in“Vector network analyzer ferromagnetic resonance of thin films oncoplanar waveguides: Comparison of different evaluation methods” in J.of Applied Physics 101, 074505 (2007), and in “Open-Circuit One-PortNetwork Analyzer Ferromagnetic Resonance” in IEEE Trans. Magn., Vol. 44,No. 11, p. 3265 (2008). In these experiments, the planar WGTL istypically attached to radiofrequency (RF) connectors by microwaveelectrical probes and placed between the poles of an electromagnet.Thus, given the size of the WGTL and the size of the gap of typicalelectromagnets, only small samples (normally <1 inch in diameter) can bemeasured. Accordingly, wafers typically used in the microelectronicsindustry (having diameters of 6, 8, 12 inches or more) can only bemeasured with this FMR technique if they are cut into small coupons.

Since conventional FMR techniques are destructive, time consuming, andlimited to measuring small pieces of a wafer, they are undesirable to anextent that prevents wide acceptance of FMR as a characterization toolin the magnetic data storage industry. An improved FMR measurementsystem and technique is needed that enables fully automated measurementson whole wafers for faster throughput and lower cost. Moreover, theimproved FMR system should be constructed from commercially availableparts.

SUMMARY

One objective of the present disclosure is to provide a fully automatedFMR system that enables a plurality of sites on a whole wafer to bemeasured simultaneously or consecutively without lateral movement of aFMR probe relative to the wafer.

A second objective of the present disclosure is to provide a fullyautomated FMR system according to the first objective where there isflexibility in RF power distribution to a plurality of RF probes.

These objectives are achieved according to one embodiment of the presentdisclosure with a FMR measurement system that is configured with aplurality of “m” RF probes where “m” is an integer ≥2 and each having aRF input from a RF generator and a RF output to a separate RF diode(total of “n” RF diodes where m=n), and wherein each RF probe performs aFMR measurement at a predetermined location or (x_(i), y_(i)) coordinateon a wafer under test (WUT). In other embodiments, there may be “n” RFdiodes linked to “m” RF probes where n<m. In preferred embodiments, theRF probes are attached to a mounting plate and installed in anelectrical probe station that is controlled by a computer. Each RF probefunctions as a waveguide transmission line (WGTL) and is in the form ofa microstrip, stripline, coplanar waveguide, grounded coplanarwaveguide, a form of printed circuit board transmission line, a coaxialwaveguide or any other microwave connector, as well as a commercial RFelectrical probes comprising but not limited to GS, SG, GSG, GSSG orsimilar configurations (where G refers to ground path and S refers tosignal path), or an antenna.

During FMR measurements, a RF probe contacts a portion of a magneticstructure to be measured on the WUT or is placed within 100 microns ofthe WUT. In one embodiment, there is a plurality of “m” magnetic polesjoined to the mounting plate such that a magnetic field issimultaneously applied vertically to each of “m” predetermined locationswhile a RF probe applies one or more microwave frequencies therebyinducing a FMR condition in the magnetic film at each selected (x_(i),y_(i)) coordinate on the WUT. In order to deliver a RF microwave signalfrom the RF generator to each and every RF probe, a multi-port RF powerdistribution device with a high level of isolation between output portsis used. The RF power distribution device may be one of several types ofRF microwave components and devices capable of distributing and/orcombining RF microwave signals, which include but are not limited topower splitters, power dividers, directional couplers, hybrid couplers,microstrip couplers, and waveguide couplers. Wilkinson power dividers,for instance, provide in addition to equal splitting amplitude of theinput signal (as many other power dividers) a high level of isolationbetween output ports while ensuring a matched condition at all outputports. In other embodiments, multiple RF power distribution devices areconnected either sequentially in series or in a “tree-like”configuration to deliver the RF microwave signal from the RF generatorto each and every RF probe. A tree-like configuration is defined as astructure where one input ends in two or more outputs, and each outputmay lead to a new input that in turn ends in two or more outputs toprovide a branch layout.

In another embodiment, the magnetic assembly comprises a plurality of“m” sets of two magnetic poles that are positioned on either side ofeach of the “m” RF probes thereby providing an in-plane magnetic fieldto the magnetic film during the RF measurements. The magnetic poles arepreferably proximate to the magnetic film on the WUT but are notcontacting a top surface thereof.

According to one embodiment that represents a RF transmission mode forperforming the FMR measurements, each output port of the RF powerdistribution device is attached through a RF input cable to a firstconnector on a RF probe. Thus, a RF signal may pass through a signal (S)pathway in the RF probe while a magnetic field is applied to themagnetic structure contacted by or in proximity to the RF probe. Whenthe RF signal excites the magnetic layers in the test structure, thereis a power loss that is transmitted through the S pathway in the RFprobe and detected by a RF diode, which is linked to a second connectoron the RF probe through a RF output cable. Each of the “m” RF probes isconnected to one of the “n” RF diodes to transmit a separate signal to acontrol computer for analysis. There may be a data acquisition (DAQ)system or voltmeter in order to transmit the data acquired from each RFdiode to the control computer. The transmitted power at each testlocation is typically measured in response to different applied RFfrequencies and as a function of applied field. In alternativeembodiments, the transmitted power at each test location may be measuredas a function of the applied RF frequency for different applied magneticfields.

In an alternative embodiment that is a reflectance FMR measurement mode,the components in the first embodiment are retained except a directionalcoupler is inserted in each link between a RF probe and an output portof the RF power distribution device. The output RF signal is sent fromthe directional coupler to the RF diode and then to the DAQ system andthe control computer.

In all embodiments, each of the “m” RF probes transmits a sequence of RFmicrowave frequencies (RF input signals) to a selected location on theWUT. A FMR condition is established at each predetermined location inthe magnetic film or patterned structure with each applied RF microwavefrequency, and the extent of RF microwave absorption is dependent on themagnitude of the RF microwave frequency, the applied magnetic field, andthe magnetic properties in the magnetic film or patterned structure. Asa result of FMR absorption, there is a power loss between the input RFsignal and the output RF signal that is detected by the RF power diode.The RF power diode converts each RF output signal to a voltage readoutthat is routed to the DAQ system and the control computer to determineHk, and α, for example, for the magnetic structure.

In an alternative embodiment, FMR measurements and/or data acquisitionare done consecutively. For this method, RF routing devices may be used.RF routing devices are defined as electrical devices with multiple inputports and/or multiple output ports enabling the selection of one inputport/output port pair to ensure a transmission signal path from onedevice to another. Contrary to RF power distribution devices, whichdistribute power to all the outputs at the same time, RF routing devicesdistribute power to only one output at a time. Examples of such routingdevices include, but are not limited to, RF electromechanical switchesor solid state switches. In one embodiment of a consecutive measurement,a multi-port RF electrical switch (or a plurality of RF switchesconnected in a “tree-like” configuration) is used to route the RFmicrowave signal from the RF microwave generator to one of the RFprobes. For this embodiment, a multi-port RF electrical switch (or aplurality of RF switches connected in a “tree-like” configuration) canalso be used to route the RF output signal from each and every RF probeto a single RF power diode.

Since a single controller (control computer) may be employed to manageall aspects of the testing including up and down movement of themounting plate relative to the WUT, RF signal processing, magnetic fieldgeneration, and compilation of the test data, throughput is optimized sothat the FMR measurement system is said to be fully automated, and maybe readily implemented in an engineering or production environment.Moreover, the RF probes, magnetic assembly, mounting plate, and RFcircuit components including the RF power distribution devices, RF powerdiodes, and RF routing devices are commercially available and may bereadily configured to provide a reliable FMR measurement system.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A shows a schematic description of the typical series ofLorentzian shaped peaks derived from ferromagnetic resonancemeasurements taken for 24 GHz to 48 GHz microwave frequencies.

FIG. 1B shows a plot of resonance field (H_(R)) as a function of themicrowave frequencies used in FIG. 1A.

FIG. 2A is a diagram showing the various components of a fully automatedsimultaneous FMR measurement system according to a first embodiment ofthe present disclosure.

FIG. 2B is a schematic drawing of an FMR system of the presentdisclosure wherein a RF power routing device is used to address the RFinput power to a predetermined RF probe for consecutive FMRmeasurements.

FIG. 2C is a schematic drawing of an FMR system of the presentdisclosure wherein a first RF power routing device distributes the RFinput power to a predetermined RF probe and a second RF power routingdevice routes a RF output signal to a RF power diode to enableconsecutive FMR measurements.

FIG. 2D is a schematic drawing that shows a “tree-like” configurationfor either a RF power distributor device or a RF power routing deviceused in a FMR measurement according to an embodiment of the presentdisclosure.

FIG. 2E is an enlargement of the RF transmission pathways from the RFpower routing/distribution device to a plurality of RF probes, from theRF probes to a plurality of RF diodes, and from the RF diodes to a dataacquisition system according to various embodiments of the presentdisclosure.

FIG. 3 is an oblique view of a RF probe that includes two sets ofpathways (two for ground and two for signals) that is part of the fullyautomated FMR measurement system according to an embodiment of thepresent disclosure.

FIG. 4 is a diagram of a multi-port RF power divider that is employed todeliver a RF input signal to multiple RF probes in a FMR measurementsystem according to an embodiment of the present disclosure.

FIG. 5 is a diagram of multiple RF directional couplers connected inseries that are used to deliver a RF input signal to multiple RF probesin a transmission mode according to another embodiment of the presentdisclosure.

FIG. 6 is a diagram of a multiple RF directional coupler configurationthat is used to deliver a RF input signal to multiple RF probes in areflectance mode according to an embodiment of the present disclosure.

FIG. 7 shows a FMR measurement layout configured with a multi-port RFpower distribution device that delivers a RF input signal to multiple RFprobes each aligned over a predetermined location on a WUT according toan embodiment of the present disclosure.

FIG. 8 shows a top-down view of a magnetic assembly comprised of “m”magnetic poles that are aligned over each predetermined FMR measurementlocation on a WUT according to an embodiment of the present disclosure.

FIG. 9 is a cross-sectional view of a magnetic assembly that is alignedover a plurality of RF probes to enable multiple FMR measurements without-of-plane magnetic fields to be taken simultaneously on a WUTaccording to an embodiment of the present disclosure.

FIG. 10 is cross-sectional view of a magnetic assembly with two magneticpoles on opposite sides of each RF probe to enable multiple FMRmeasurements with in-plane magnetic fields to be taken simultaneously ona WUT according to an embodiment of the present disclosure.

FIG. 11 shows a flow diagram of a RF input signal pathway to a RF powerdistribution device and a RF output signal pathway to a computeraccording to an embodiment of the present disclosure.

FIG. 12 is a plot of acquired data from a RF diode as a function ofvarious applied magnetic fields at different RF microwave frequenciesaccording to an embodiment of the present disclosure.

FIG. 13A is a diagram showing the layout of a two RF probe FMRmeasurement scheme (“2probe”) where the RF power distribution device isa broadband RF directional coupler, and where measurements are performedsimultaneously at different locations on a WUT.

FIG. 13B is a diagram showing the layout of a single FMR measurement (“1probe”) where one location of a single WUT is measured.

FIG. 13C is a diagram wherein the layout in FIG. 13A is modified byreplacing the broadband RF directional coupler with a RF power dividerhaving two output ports according to an embodiment of the presentdisclosure.

FIGS. 14A-14B show a comparison of experimental results between a“2probe” FMR configuration (FIG. 13A) and a “1probe” FMR configuration(FIG. 13B).

DETAILED DESCRIPTION

The present disclosure is a FMR measurement system that is capable ofsimultaneously or consecutively measuring magnetic properties includingH_(K) and a in magnetic films or in patterned magnetic structures at aplurality of predetermined locations on a WUT where the locations may besubstantially smaller than 1 mm in diameter. A plurality of “m” RFprobes and “n” RF diodes (where n is an integer 1≤n≤m) are configured ineither a RF transmission mode or a RF reflectance mode for FMRmeasurements. Each test location has an x-axis and y-axis (x_(i), y_(i))coordinate on the WUT and is in a plane that is aligned parallel to andabove the plane of a wafer chuck. The terms “RF” and “microwave” may beused interchangeably as well as “controller”, “computer” or “controlcomputer”. It should be understood that the term “magnetic film” mayrefer to one layer, a plurality of magnetic layers formed in a stack oflayers, or a plurality of patterned magnetic structures such as magnetictunnel junction (MTJ) cells in magnetic random access memory (MRAM)arrays on the WUT. The present disclosure also encompasses an embodiment(not shown) where the simultaneous FMR measurement scheme describedherein is incorporated in a scanning FMR measurement system that waspreviously described in related U.S. patent applications with Ser. Nos.15/463,074 and 15/875,004. Therefore, the simultaneous measurement at“m” locations may be repeated one or more times to probe a total of “2m”or “3m” different locations, for example, by moving the WUT for each setof “m” different locations.

In related U.S. patent application Ser. No. 15/463,074, we disclosed aFMR measurement system that relies on a WGTL that is attached to RFinput and RF output connectors and is capable of taking measurements ata plurality of sites on a whole wafer. However, the area probed in themeasurement is quite large (mm to cm diameter) compared with sub-microndimensions in memory device structures. In related U.S. patentapplication Ser. No. 15/875,004, we disclosed an improved FMRmeasurement system constructed from commercially available components,and that enables magnetic properties to be monitored and measured insmaller structures substantially less than 1 mm in diameter. However,the scanning method requires total measurement time to be more than 1hour in order to probe an 8″ wafer at 20 different locations for atypical experiment. Here, we disclose a new FMR measurement systemhaving a configuration that enables total measurement time for aplurality of “m” locations to be reduced to less than 5 minutes for an8″ wafer, which is a significant improvement in an engineering orproduction environment. Much faster measurements can also allow forlonger averaging times at each probing location, thus improving thesignal to noise ratio of the experiment.

Referring to FIG. 2A, one embodiment of a FMR measurement systemaccording to the present disclosure is depicted in a diagram that showsthe layout of the key components. There is a computer 11 to manage theup movement 51 u or down movement 51 d of the prober stage also known aswafer chuck 20, and WUT 22 on which the magnetic film 23 to be tested isformed. The WUT is held on a top surface of the wafer chuck by a vacuum.Prior to the FMR measurement process, an alignment process is typicallyperformed where a dummy wafer with the desired test locations marked isaligned by moving the mounting plate so that the RF probe is positionedover each of the test locations. Thereafter, each WUT is brought to thesame “alignment” position as determined by the dummy wafer, and onlyvertical movements of the WUT relative to the mounting plate occurbefore and after a FMR measurement process on each WUT. Accordingly, thewafer chuck and WUT may be raised with respect to the mounting plate sothat each of the “m” RF probes 40 a-40 m contacts or is proximate to apredetermined test location on the WUT where “m” is an integer ≥2. Anelectrical probe station may be employed to position the mounting plateabove the WUT with respect to lateral movement (x-axis and y-axisdirections), and also to manage the vertical approach to adjust contactor proximity to the WUT as directed by the controller. However, inanother embodiment, the RF probes may be attached to a probe card.

The magnetic assembly 30 is comprised of at least one magnetic fieldsource, but may include a plurality of “k” magnetic poles (k being aninteger 1≤k≤m) in some embodiments. In other embodiments, the magneticassembly may comprise one or more coils of superconducting wires so thatno magnetic poles are necessary. Computer 11 has a link 42 a to powergenerator 34 (or plurality of power generators) that produces power toform magnetic flux in one or more magnetic poles in the magneticassembly. Accordingly, a magnetic field is applied simultaneously orconsecutively to “m” different predetermined (x_(i), y_(i)) coordinates(test locations) on the WUT while a RF signal pathway in each RF probe40 a-40 m contacts top surface 23 t of the magnetic film at acorresponding (x_(i), y_(i)) coordinate. RF signals may be delivered toeach of the RF probes by using RF power distribution devices or RF powerrouting devices. Simultaneous application of a microwave frequency (RFinput signal) from a RF probe, and an applied magnetic field (H_(ap)) ofup to 3 Tesla from a magnetic pole induces a FMR condition (RF powerabsorbance) in the magnetic film proximate to each (x_(i), y_(i))coordinate on the WUT. In other embodiments (not shown), H_(ap) may beapplied from a magnetic field source using a multi-axis vector magnet,or applied across the entire WUT, for example, using a wide-boresuperconducting magnet. Note that the applied magnetic field does notneed to be uniform across the WUT as long as the field is properlycalibrated at each predetermined measurement location.

The RF output signal from each RF probe 40 a-40 m is detected by acorresponding RF diode 44 a-44 m, which collects a RF output signaltransmitted from the magnetic film and that exits each RF probe througha signal pathway and second RF connector (not shown). Each RF outputsignal corresponds to a RF power loss caused by the FMR condition wherea certain amount of microwave power is absorbed and excites the magneticfilm to a resonance state. Each FMR measurement at a (x_(i), y_(i))coordinate may comprise a plurality of RF input signals eachcorresponding to a different RF frequency.

Controller 11 has an electrical connection 42 b to RF generator 48 thatprovides a RF input signal 42 s to a RF power distribution device 60.According to one embodiment, the number of output ports in the RF powerdistribution device matches the number of “m” RF probes so that each RFprobe receives a RF input signal 42 m from a separate output port. Eachinput signal is transported through one of the RF transmission lines 100a-100 m shown in FIG. 2E. However, there may be a plurality of RF powerdistribution devices so that a first RF power distribution device withm₁ output ports transmits RF signals to a first set of m₁ RF probes, andat least a second RF power distribution device with m₂ output portstransmits RF signals to a second set of m₂ RF probes where m₁+m₂=m. Inyet another embodiment, the distribution element employed to deliver aRF input signal 42 m to each RF probe may be a combination of RF powerdistribution devices such as a broadband RF power divider and one ormore broadband RF directional coupler devices such that the RF powerdivider splits the RF input signal to two or more sets of one or more RFprobes while the RF directional couplers transmit the split RF inputsignal to a second set of one or more RF probes. Note that the outputconnector 17 b is comprised of a plurality of RF transmission lines 101a-101 m between RF probes 40 a-40 m and RF diodes 44 a-44 m as shown inFIG. 2E. Also, DC output 45 is transmitted through a plurality oftransmission lines 102 a-102 m from the RF diodes to DAQ 10.

In a preferred operating mode for a FMR measurement, the appliedmagnetic field is varied (swept from a minimum to a maximum value) at aconstant microwave frequency. The FMR measurement is preferably repeatedby sweeping the magnetic field successively through each of a pluralityof different microwave frequencies. In one embodiment, each RF diode 44a-44 m converts the power output from one of the plurality of “m” RFprobes 40 a-40 m to a voltage signal that is transmitted to DAQ system10. This DAQ system digitizes the voltage output signals from each RFprobe, allowing them to be processed by the controller 11. Thereafter,the controller 11 calculates H_(k), α, γ and inhomogeneous broadening(L₀) based on each pair of applied magnetic field value and appliedmicrowave frequency used to establish a FMR condition, and on voltageoutput data from each RF diode that contacts a specific (x_(i), y_(i))coordinate selected for a FMR measurement.

In another embodiment depicted in FIG. 2B, the FMR system has a RF powerrouting device 60 r that is used to distribute the RF input power 42 sto a predetermined RF probe (one of 40 a-40 m) through one of the 42 mpathways described previously to enable consecutive FMR measurements.All other features of the previous embodiment in FIG. 2A are retained.The power routing device may be comprised of multiport electro-mechanicor solid-state RF switches (or multiple RF switches connected in a“tree-like” configuration as shown in FIG. 2D) that are used to routethe microwave input signal from the RF generator 48 to one of the RFprobes 40 a-40 m. The power routing device is connected through link 42e to the computer 11, which is programmed to access all the RF probesconsecutively. Although this method is in general slower thansimultaneous measurements, it can be useful in some special cases forwhich high input power is needed. Indeed, in this case, the full inputRF power is routed to a single RF probe instead of being split betweenseveral RF probes. Note that RF routing devices can be switched rapidly,allowing for faster measurements than when a single RF probe is used formeasuring a plurality of locations on the WUT.

The present disclosure also encompasses another embodiment shown in FIG.2C where the FMR system is configured to enable consecutive FMRmeasurements and is a modification of the previous embodiment. There isa first RF power routing device 60 r 1 used to distribute the RF inputpower to a predetermined RF probe (one of 40 a-40 m). Thus, a RF inputsignal 42 s from the RF generator is routed from the RF power routingdevice to a RF probe through one of the 42 m pathways. In addition,there is a second RF power routing device 60 r 2 between the RF probesand a RF diode 44 that is employed to select a RF output signal of apredetermined RF probe and then send the RF output signal to the RFdiode. A link 42 f is provided between the computer 11 and second RFrouting device to manage the routing of RF output signals.

According to another embodiment in FIG. 2D, a tree-like configuration isdepicted that may serve as either a RF power distributor shown in FIG.2A, or as a RF power routing device depicted in FIGS. 2B-2C, andhereafter described in general terms as a RF d/r device. RF inputsignals 42 s from the RF generator are sent to a first port 60-1 of RFd/r device 60. First and second RF signals 42 s 1, 42 s 2 are thentransmitted from ports 60-2, 60-3, respectively, to RF d/r devices 60-A(port 60-4), and 60-B (port 60-5), respectively. Thereafter, RF signalsfrom RF d/r device 60-A ports 60-6, 60-7 are transmitted to RF d/rdevices 60-AA (port 60-10) and 60-AB (port 60-11), respectively, and RFsignals from RF d/r device 60-B ports 60-8, 60-9 are transmitted to RFd/r devices 60-BA (port 60-12), and 60-BB (port 60-13), respectively.Subsequently, RF input signals 42 m from RF d/r devices 60-AA (ports60-14, 60-15), 60-AB (ports 60-16, 60-17), 60-BA (ports 60-18, 60-19),and 60-BB (ports 60-20, 60-21) are sent to RF probes 40 a-40 m. Notethat each tier (60-A+60-B) and (60-AA+60-AB+60-BA+60-BB) is optional sothe tree-like configuration may be shortened to include only RF d/rdevice 60, or only three RF d/r devices 60, 60-A, and 60-B, for example.Furthermore, an additional tier with eight more RF d/r devices (notshown) may be provided below the third tier (60-AA+60-AB+60-BA+60-BB) sothat up to sixteen RF input signals 42 m through pathways 100 a-100 m(FIG. 2E) may be transmitted to RF probes in a RF power distributionscheme rather than a maximum of eight RF input signals 42 m from theexemplary embodiment. The RF power routing option enables a minimum ofonly one pathway through one or more tiers of devices to be active for acertain period of time such that a RF input signal 42 m is transmittedto only one RF probe through one of the pathways 100 a-100 m (FIG. 2E)to measure a first predetermined location on a WUT. Other RF probes tomeasure additional predetermined locations may be activated inconsecutive fashion with RF input signals through other pathways 100a-100 m.

The present disclosure encompasses designs other than those illustratedin FIGS. 2A-2D that may be employed to generate the microwave excitation(FMR condition) of a magnetic film sample, and detect the powerabsorption therein. For instance, a vector network analyzer (VNA) may beused as a RF output generator and RF input analyzer. In anotherembodiment related to pulsed inductive microwave magnetometry (PIMM), apulse generator and a time-resolved oscilloscope may serve as a RFsource and RF analyzer, respectively. In yet another embodiment, alock-in amplifier detection technique known to those skilled in the artmay be employed to amplify the FMR output signal, which indicates thepower loss from each FMR condition. Furthermore, a plurality of RFgenerators may replace a single RF microwave source including aconfiguration where each of plurality of “p” RF generators (where p isan integer 1<p≤m) are configured to provide a sequence of RF inputsignals to a different RF probe, or where a first RF generator suppliesRF input signals to a first group of one or more probes, and at least asecond RF generator sends RF input signals to a second group of one ormore RF probes.

Referring to FIG. 3, an oblique view of a commercially available RFprobe 40 a is depicted that is duplicated in the other RF probes 40 b-40m (not shown). The RF probe is attached to a chassis 70 by screws 41.First and second RF connectors 17 a, 17 b, respectively, that areattached to the RF probe are shown protruding from a top surface of thechassis. The RF probe tip 46 extends from a front face of the RF probeand in the exemplary embodiment has two sets of probe ends arranged in aGSSG pattern according to one embodiment where G probe ends 46 g areground pathways, and S probe ends 46 s are signal pathways that eachcontact a top surface of a magnetic structure or film (not shown) to betested. In some embodiments, the S and G probe ends have a diameter thatis on the order of tens of microns, although a bottom portion thereofthat contacts a top surface of the magnetic film may have a dimensionproximate to 1 micron. In other embodiments, the RF probe tip may havealternative designs such as GS, SG, and GSG that are well known in theart.

During a transmission mode of FMR measurement, the RF input signal istransmitted to the magnetic film through one of the signal pathways 46s, and the RF output signal to one of the RF diodes passes through theother of the signal pathways 46 s. Optionally, a two GS, SG, or GSGprobe design may replace a GSSG probe design where an S pathway in afirst RF probe carries RF input signals, and an S pathway in the secondRF probe carries RF output signals. In an alternative embodiment,relating to a reflectance mode of FMR measurement, the RF input signaland RF output signal pass through the same signal pathway to and fromthe magnetic film. Accordingly, the RF probe tip may have a GS, GSG, orSG configuration, or a GSSG configuration where the second S pathway isunused.

A RF probe is not limited to the design in FIG. 3 and may be amicrostrip, stripline, coplanar waveguide, grounded coplanar waveguide,a form of printed circuit board transmission line, micro cavity, coaxialwaveguide, or a form of microwave antenna that are all known in the art.

Referring to FIG. 4, one embodiment of a RF power distribution device 60such as a Wilkinson power divider described in “An N-Way Hybrid PowerDivider”, IRE Trans. on Microwave Theory and Techniques”, Vol. 8, p.116-118 (1960) is depicted. Although FIG. 4 shows 6 output portsPT1-PT6, the number of ports may be ≥2 and equal to “m” according to anembodiment of the present disclosure such that each of the “m” outputports sends a RF signal to one of the RF probes 40 a-40 m describedpreviously. Wilkinson power dividers may provide in addition to equalsplitting amplitude as other commercial RF power dividers, a high levelof isolation (typically from 15 dB to 30 dB) between output ports whileensuring a matched condition at all ports. Broadband 4-way Wilkinsonpower dividers up to 50 GHz are commercially available.

In another embodiment shown in FIG. 5, a RF input signal 42 s from RFgenerator 48 is sent to a multi-port RF directional coupler device 60configured by multiple broadband RF directional couplers connected inseries in a transmission FMR measurement mode, and comprised of “m”broadband RF directional couplers 60-1, 60-2, 60-3, and up to 60-m eachhaving an input port 61 a, 61 b, 61 c, and 61 m, respectively, atransmission port 62 a, 62 b, 62 c, and 62 m, respectively, and acoupled port 63 a, 63 b, 63 c, and 63 m, respectively. RF directionalcouplers can also offer a high level of isolation (usually 15 dB to 30dB) between output (coupled and transmission) ports. Thus, a pluralityof “m” RF directional couplers may be connected in series to deliver aRF signal to each of the “m” RF probes 40 a-40 m from a plurality of “m”coupled ports 63 a-63 m.

Considering that the isolation between each RF directional coupler is atleast 15 dB, the reflected signal from each RF probe that would betransmitted to the next RF probe would be attenuated at least 30 dBensuring a desirable level of isolation between each FMR test locationcorresponding to a (x_(i), y_(i)) coordinate on the WUT. Therefore, theRF input signal to RF probe 40 a has a power P₃, the RF input signal toRF probe 40 b has a power P₅, the RF input signal to RF probe 40 c has apower P₇, and the RF input signal to RF probe 40 m has a power P_(2m+1)where P₃>P₅>P₇>P_(2m+1). The RF signal (P_(2m)) from the finaltransmission port 62 m is grounded. It should be understood that eventhough there may be a considerable power difference between P₃ andP_(2m+1), FMR measurement reliability is not particularly sensitive topower magnitude which means usable RF output signals are collected fromall of the “m” RF probes 40 a-40 m.

According to the exemplary embodiment, the RF output signal from each RFprobe is transmitted to the corresponding RF diode during FMRmeasurements. In other words, RF output from RF probe 40 a at a firsttest coordinate is transmitted to RF diode 44 a, RF output from RF probe40 b at a second test coordinate is transmitted to RF diode 44 b, and soforth up to RF output from RF probe 40 m at an mth test coordinate thatis transmitted to RF diode 44 m. Thereafter, each RF diode transmits aRF output signal to computer 11, preferably through a DAQ system 10shown in FIG. 2. A RF diode may be a Schottky diode or another RF diodewherein a voltage signal is produced corresponding to the RF power lossduring a microwave absorption (FMR condition) at a test location in themagnetic film.

Referring to FIG. 6, an alternative directional coupler scheme isillustrated for use in a FMR measurement reflectance mode. Thedirectional coupler device 60 with a plurality of directional couplers60-1 to 60-m arranged in series is maintained from the previousembodiment. However, each RF probe 40 a-40 m is configured in areflectance mode, i.e. terminated by an open-circuit, wherein the RFinput signal transmitted to a test location through a signal pathway inthe RF probe is reflected back as the RF output signal from the testlocation through the same signal path. Accordingly, a second set ofdirectional couplers 64-1 to 64-m is employed wherein one of the secondset of directional couplers is inserted between each pair of coupledoutput ports 63 a-63 m and RF probes 40 a-40 m. Each of the directionalcouplers 64-1, 64-2, 64-3, and up to 64-m has an input port 65 a, 65 b,65 c, and 65 m, respectively, that receives a RF signal from an outputport 63 a, 63 b, 63 c, and 63 m, respectively, and has an output port 66a, 66 b, 66 c, and 66 m, respectively that sends a RF signal to RF probe40 a, 40 b, 40 c, and up to 40 m, respectively. Part of the RF outputsignals reflected back from RF probes 40 a, 40 b, 40 c, and 40 m will betransmitted through output ports 67 a, 67 b, 67 c, and 67 m,respectively, to RF diodes 44 a, 44 b, 44 c, and 44 m, respectively.Each RF output signal that is received by a RF diode is converted to avoltage signal and transmitted to a DAQ system 10 and computer 11 fordata acquisition and processing.

FIG. 7 shows one embodiment of a FMR test apparatus of the presentdisclosure. In particular, an array of “m” RF probes 40 a-40 m is formedin an array of rows and columns and positioned above the WUT 22 that mayhave a 6″, 8″, or 12″ diameter, for example. In the exemplaryembodiment, there are 13 RF probes laid out in five rows and columnsthat are spaced substantially equally across the wafer. However, insteadof m=13, the value of “m” may be any integer ≥2 which means the array ofRF probes on the wafer may have any design including but not limited toa linear shape, a pattern of rows and columns, or an irregular shape. Inone embodiment, each RF probe is positioned in contact with or proximateto a different sector of the WUT during a FMR measurement where eachsector has a fixed x-axis dimension and fixed y-axis dimension around acertain (x_(i), y_(i)) center point. A sector may correspond to a squareor rectangular shaped chip (die) or a block of chips in the magneticfilm on the WUT.

The WUT is shown below a circular opening 80 that is formed withinmounting plate 28. The magnetic assembly is not shown in this drawing inorder to focus on the path of RF input from RF generator 48 to themulti-port RF power distribution device 60 and then the paths of themultiple RF input signals from the RF power distribution device to eachRF probe. Two multi-port RF power distribution devices 60 on oppositesides of the WUT are shown to more clearly indicate RF input/outputpathways. However, in an actual FMR measurement apparatus, there may beonly one multi-port RF power distribution device with a connection toeach of the “m” RF probes, or more than two RF power distributiondevices. RF signals 42 m are transmitted from a power distributiondevice 60 through pathway 100 a to RF probe 40 a, through pathway 100 bto RF probe 40 b, and so forth up to pathway 100 m to RF probe 40 m.Each link between a RF probe and a RF diode is one of the 101 a-101 mpathways shown in FIG. 2E. Moreover, each link that carries a DC outputsignal between a RF diode and DAQ 10 is one of the 102 a-102 m pathwaysin FIG. 2E. Thus, DC output 45 from each of the RF diodes 44 a-44 m istransmitted to at least one DAQ system 10 and computer 11 after thediodes receive RF output signals from RF probes during a FMR measurementprocess.

According to the exemplary embodiment, a plurality of RF probes 40 e-40i contact five different test locations formed proximate to center plane1-1 that bisects WUT 22. Moreover, another four RF probes 40 a-40 dcontact test locations in the upper half of the WUT (above the centerplane) while the remaining four RF probes 40 j-40 m contact testlocations in the lower half of the WUT. According to a preferredembodiment, the mounting plate 28 with magnetic assembly (not shown),multi-port RF power distribution devices 60, and RF probes are installedon a commercial electrical probe station that is available fromdifferent vendors. This exemplary embodiment will allow measuring 13different locations simultaneously in a wafer-sized magnetic film.

In FIG. 8, a top-down view is shown of a magnetic assembly configurationthat is compatible with the layout of RF probes and RF diodes in FIG. 7.Each of “m” magnetic poles 32 a-32 m is shown with a surrounding coil 31that generates a magnetic field in the magnetic pole formed within. Eachmagnetic pole preferably has a pole tip aligned above one of the (xi,yi) test locations and proximate to one of the RF probes 40 a-40 mdepicted in FIG. 7. For example, at plane 2-2 that is parallel to centerplane 1-1, there is a magnetic pole 32 b in proximity to RF probe 40 bat a first test location, a magnetic pole 32 c in proximity to RF probe40 c at a second test location, and a magnetic pole 32 d in proximity toRF probe 40 d at a third test location. Accordingly, the “m” magneticpoles are arranged in essentially the same design used for the “m” RFprobes shown in FIG. 7. In other embodiments, larger magnetic poles canbe used so each pole tip could be aligned to several (xi, yi) testlocations. In such a case, a magnetic assembly configuration with “k”magnetic poles (where k is an integer 1≤k≤m) would be necessary.

In FIG. 9, a cross-sectional view is shown at plane 2-2 in FIG. 8according to one embodiment of the present disclosure and depictsmagnetic assembly comprised of magnetic poles 32 b, 32 c, and 32 d heldby mounting plate 28. Each magnetic pole is formed between return poles33. Each RF probe including RF probe 40 b with a probe tip contacting orproximate to the first test location at (x₁, y₁), RF probe 40 c with aprobe tip contacting or proximate to the second test location (x₁, y₂),and RF probe 40 d with a probe tip contacting or proximate to the thirdtest location (x₁, y₃), is attached to a mounting bracket 29, which isan extension of the mounting plate.

Wafer chuck 20 has a plurality of holes 20 v in a top surface thereof toallow a vacuum to be applied and hold the WUT 22 in position. The waferchuck may move vertically 51 to bring the RF probes in contact with thetest locations, or place the RF probes within a distance <100 micronsabove the magnetic film (not shown) on the WUT. RF input and outputcables 17 a, 17 b, respectively, are connected to each RF probe througha 90° elbow connector 16 in the exemplary embodiment. During a FMRmeasurement, a magnetic field H_(ap) is applied in a directionorthogonal to WUT top surface 22 t simultaneously with a microwavefrequency from RF probes at the selected (x_(i), y_(i)) coordinatescorresponding to “m” test locations across the WUT. The presentdisclosure anticipates that the magnetic field and microwave frequencymay be applied simultaneously at all “m” test locations, orconsecutively wherein a first location is tested before a secondlocation in succession up to an mth location is tested. Preferably, alllocations are tested simultaneously to minimize total FMR measurementtime. RF frequencies employed for FMR measurements with this magneticassembly are typically in the range of 1 to 100 GHz.

Referring to FIG. 10, a cross-sectional view taken at plane 2-2 in FIG.8 is shown according to another embodiment of the present disclosure.Here, the magnetic assembly is comprised of sub-units 30 b, 30 c, 30 dadjoined to mounting plate 28. RF probes 40 b, 40 c, and 40 d are incontact with, or are proximate to the first, second, and third testlocations, respectively, as described in the previous embodiment. Eachsub-unit has two magnetic poles that are surrounded by coils 31. Thus,magnetic poles 32 b 1, 32 b 2 in sub-unit 30 b are positioned onopposite sides of RF probe 40 b, and proximate to the WUT 22 but do nottouch the magnetic film (not shown). Likewise, magnetic poles 32 c 1, 32c 2 in sub-unit 30 c are positioned on opposite sides of RF probe 40 cwhile magnetic poles 32 d 1, 32 d 2 in sub-unit 30 d are positioned onopposite sides of RF probe 40 d. The pole configuration produces amagnetic field H_(ap) in the plane of the magnetic film proximate toeach (x_(i), y_(i)) coordinate where a RF probe tip is positioned. Notethat for such in-plane configuration, the magnetic assembly can also beconfigured in such a way that magnetic poles at each sub-unit arepositioned transverse to the RF probe (enabling for shorter distancebetween the poles, and therefore higher in-plane magnetic fields).Applied RF frequencies during FMR measurements for this magneticassembly configuration may be in the range of 0.01 to 100 GHz.

Referring to FIG. 11, a schematic drawing of a FMR measurement system inFIG. 2A is modified to show a RF pathway that is configured to include afrequency multiplier module 47 such as an active frequency doubler,which is placed between the RF generator 48 and the multi-port RF powerdistribution device 60. Furthermore, a low noise amplifier (or multiplelow noise amplifiers) 49 may be included between one or more of the RFdiodes 44 a-44 m and computer 11 to compensate for power loss induced bythe power distribution, and improve FMR signal sensitivity. Preferably,there is a DAQ system 10 positioned between the plurality of RF diodesand computer 11 that receives DC output 45 in the form of analog voltagesignals from each of the RF diodes (or from the one or more low noiseamplifiers), and converts the data to digital signals that aretransmitted to the computer for data acquisition and analysis.

As indicated earlier, it is important that each magnetic pole isaligned, at least, over one of the (x_(i), y_(i)) coordinates where a RFprobe tip makes contact with or is proximate to a top surface of themagnetic film 23 (shown in FIG. 2) so that each test location is exposedto both of an applied magnetic field (H_(ap)) and a RF frequency (f_(R))that may induce a FMR condition for each FMR measurement. Moreover, themagnetic field may be applied in a direction orthogonal to the WUT 22 asin FIG. 9, or in the plane of the magnetic film or magnetic structure onthe WUT as in FIG. 10.

During a FMR measurement when a magnetic field is applied to an areaaround a (x_(i), y_(i)) coordinate, a portion of the microwave powersupplied by the RF input signal through an RF input cable 17 a to one ofthe RF probes 40 a-40 m is absorbed by the magnetic film during a FMRcondition so that the RF output signal carried through RF output cable17 b and through a corresponding RF power diode 44 a-44 m in a RF outputpathway has reduced power compared with the RF input signal. The RFpower diode converts the RF output signal for each (H_(ap), f_(R)) pairto a voltage measurement that is relayed to the computer 11. Theamplitude of the applied magnetic field (H_(ap)) may be varied for agiven RF frequency (f_(R)), or a plurality of RF frequencies may beapplied with a constant magnetic field during each FMR measurement.Preferably, the applied magnetic field is swept from a minimum to amaximum value at a constant microwave frequency (F1), and then the FMRmeasurement is repeated by sweeping the magnetic field successively witheach of a plurality of different microwave frequencies (F2, F3, . . .Fn). Alternatively, the RF frequency may be swept from a minimum to amaximum value for each applied magnetic field in a series of increasingmagnitudes from H1, H2, and so forth up to Hn during a FMR measurement.

Computer 11 uses the FMR measurement data from each test location andone or more of equations (1)-(3) described previously to determineH_(K), α, γ, and inhomogeneous broadening (L₀) at each of the selected(x_(i), y_(i)) coordinates on the magnetic film, which may be a stack oflayers in an unpatterned film, or in a plurality of patterned deviceshaving sub-millimeter or even sub-micron dimensions along the x-axis andy-axis directions.

Using the RF transmission mode embodiment described earlier, weperformed FMR measurements on full (unpatterned) film structures. FIG.12 depicts a typical data set that results from one test locationassociated with one of the predetermined (x_(i), y_(i)) coordinates. Inthis example, transmitted RF power is measured for five differentfrequencies as a function of the applied magnetic field on an uncut8-inch diameter wafer (WUT). FMR spectra in the form of curves 90, 91,92, 93, and 94 are generated with RF frequencies of 20 GHz, 25 GHz, 30GHz, 35 GHz, and 40 GHz, respectively, and sweeping the magnetic fieldbetween −1.0 Tesla (−10000 Oe) and 1.0 Tesla (10000 Oe) according to aFMR measurement method of the present disclosure. In a sequentialconfiguration (all predetermined locations are tested consecutively oneafter the other) the total FMR measurement time for the entire WUTdepends on the predetermined number of “m” (x_(i), y_(i)) coordinates tobe included in the FMR measurement sequence. However, in a simultaneousconfiguration (wherein all predetermined locations are testedsimultaneously), the total FMR measurement time is equal to the FMRmeasurement time per location and therefore independent of thepredetermined number of “m” (x_(i), y_(i)) coordinates to be measured.This implies that the total FMR measurement time may be reduced to lessthan 5 minutes per WUT when all of the locations are testedsimultaneously.

The following comparison experiment was performed in order todemonstrate the effectiveness (proof of concept) of the RF powerdistribution device aspect wherein a plurality of RF input signals forFMR measurements is provided at a plurality of test locations on a WUT(according to embodiments of the present disclosure) with no impact onthe measured FMR spectra.

Referring to FIG. 13A, two different MTJ stacks {Sample 1 (S1) andSample 2 (S2)} with similar effective anisotropy fields (Hk˜6 kOe) weremeasured simultaneously at different locations in a “2probe” FMRmeasurement system. In such a system, a RF directional coupler 60 with a10-40 GHz bandwidth, a nominal coupling of 10 dB, and directivity >10 dBis used as a RF power distribution device. Microwave excitation (RFsignal 42 s) with power P_(IN) is sent from RF generator 48 to inputport 61 a of the RF directional coupler 60. In the exemplary embodiment,one RF signal 42 m with power P3 is transmitted from coupled port 63 ato CPWG probe 40 a and a second RF signal 42 m with power P2(P3<P2<P_(IN)) is transmitted from transmission port 62 a to CPWG probe40 b. Detection of the RF output signals 45 from RF diodes 44 a and 44 bis made in a transmission mode and transmitted to a DAQ system 10 andcontroller 11 described previously.

Both stacks S1 & S2 are characterized at the center of the wafer bydifferent CPWG probes. In one configuration, stack S1 at a first testlocation is characterized by a CPWG probe 40 a while stack S2 at asecond location is characterized by CPWG probe 40 b. In thisconfiguration, S1 is characterized by the RF input signal 42 mtransmitted from coupled port 63 a as sketched in FIG. 13A (“2 probe-CP”configuration). Alternatively, in another configuration, stack S1 at afirst test location is characterized by a CPWG probe 40 b while stack S2at a second location is characterized by CPWG probe 40 a. In thisconfiguration S1 is characterized by the RF input signal 42 mtransmitted from transmission port 62 a in the same directional coupler(“2 probe-TP” configuration, not shown).

In FIG. 13B, a second part of the comparison experiment is depictedwhere each of the stacks S1 and S2 were measured separately duringdifferent time periods with a single CPWG probe 40 a and single magneticpole 32 a according to a transmission mode embodiment of related patentapplication Ser. Nos. 15/463,074 and 15/875,004 (“1 probe” FMRconfiguration). Here, RF signal 42 s from RF generator 48 is sentdirectly to the CPWG probe, and RF output signals 45 are transmittedthrough RF diode 44 a to controller 11 via a DAQ system 10.

FIG. 14A shows the frequency dependence of resonance field (Hres) andlinewidth of the S1 stack for the three different FMR measurementconfigurations labeled as: “1 probe” where center of S1 stack ismeasured alone (FIG. 13B), “2probe-CP” where both S1 and S2 stacks aremeasured simultaneously and S1 stack is measured through coupled port 63a of RF directional coupler (FIG. 13A), and “2probe-TP” where both S1and S2 stacks are measured simultaneously and S1 stack is measuredthrough transmission port 62 a of RF directional coupler (not shown). Weobserve that all three configurations have the same frequency dependenceof Hres (line 80 in FIG. 14A) and linewidth (line 81 in FIG. 14B).Therefore, all three configurations yield identical results for MTJstack S1 showing the high level of isolation between each RF probe inthe previously described “2probe” FMR measurement scheme. There is alsoexcellent agreement between FMR spectra derived from “1probe”measurements and the “2probe” embodiment comprising a power dividershown in FIG. 13C (results not shown).

All components required to assemble a FMR measurement apparatus andsystem for either the transmission mode or reflectance mode embodimentsthat comprise either a perpendicular magnetic field or an in-plane fielddescribed herein are commercially available.

While this disclosure has been particularly shown and described withreference to the preferred embodiment thereof, it will be understood bythose skilled in the art that various changes in form and details may bemade without departing from the spirit and scope of this disclosure.

We claim:
 1. A ferromagnetic resonance (FMR) measurement system that isconfigured to determine magnetic properties in one or more magneticfilms or magnetic structures at a plurality of “m” predeterminedlocations on an entire wafer under test (WUT) where “m” is an integer≥2, comprising: a plurality of “m” RF probes each to enable transmissionof a RF input signal from at least one RF generator to the one or moremagnetic films or magnetic structures at each of the predeterminedlocations; a magnetic assembly comprised of at least one magnetic fieldsource that provides a magnetic field proximate to each of the pluralityof RF probes such that a simultaneous application of the RF input signalat a microwave frequency and the magnetic field induces a FMR conditionin the magnetic film or plurality of device structures at each of thepredetermined locations; “n” RF diodes where n is an integer 1≤n≤m,wherein each RF diode collects a RF output signal from one or more RFprobes when the FMR condition occurs at each of the predeterminedlocations; a device to deliver the RF input signal from the RF generatorto each of the RF probes; and a controller (computer) to manage anapplication of the microwave frequency and magnetic field, and toreceive an output signal from each RF diode, and wherein an acquisitionof each output signal is converted to data comprised of one or moremagnetic properties.
 2. The FMR measurement system of claim 1 whereinthe device that delivers the RF input signal from the at least one RFgenerator to each of the RF probes is a “RF power distribution device”that delivers the RF input signal to all the RF probes simultaneously.3. The FMR measurement system of claim 1 wherein the device thatdelivers the RF input signal from the at least one RF generator to eachof the RF probes is a “RF power routing device” that delivers the RFinput signal to all RF probes consecutively.
 4. The FMR measurementsystem of claim 1 wherein the device that delivers the RF input signalfrom the at least one RF generator to each of the RF probes is comprisedof a combination of one or both of at least one “RF power distribution”device and at least one “RF power routing” device.
 5. The FMRmeasurement system of claim 2 wherein the RF power distribution deviceis comprised of a broadband RF multi-port directional coupler.
 6. TheFMR measurement system of claim 2 wherein the RF power distributiondevice is configured with a plurality of “m” broadband RF directionalcouplers connected in series such that each of the broadband RFdirectional couplers transmits a RF signal to one of the “m” RF probes.7. The FMR measurement system of claim 2 wherein the RF powerdistribution device is comprised of a broadband multi-port Wilkinsonpower divider.
 8. The FMR measurement system of claim 7 wherein theWilkinson power divider has a plurality of “m” output ports such thateach output port transmits a RF signal to one of the “m” RF probes. 9.The FMR measurement system of claim 2 wherein the RF power distributiondevice has a plurality of “m” output ports such that each output porttransmits a RF signal to one of the “m” RF probes.
 10. The FMRmeasurement system of claim 2 wherein the RF power distribution deviceis comprised of a plurality of RF power distribution devices connectedin series, or in a “tree-like” configuration, or both.
 11. The FMRmeasurement system of claim 3 wherein the RF power routing device iscomprised of an electromechanical RF switch, or a solid state RF switchwith a multiplicity of outputs.
 12. The FMR measurement system of claim3 wherein the RF power routing device has a plurality of “m” outputports such that the RF signal is distributed to each of the “m” RFprobes continuously.
 13. The FMR measurement system of claim 3 whereinthe RF power routing device is comprised of a plurality ofelectromechanical RF switches or solid state RF switches connected inseries, or in a “tree-like” configuration, or both.
 14. The FMRmeasurement system of claim 3 wherein the RF power routing device iscomprised of a plurality of RF power routing devices connected inseries, or in a “tree-like” configuration, or both.
 15. The FMRmeasurement system of claim 3 wherein at least an additional RF powerrouting device is used to route the output signal of each RF probe tothe “n” RF diodes.
 16. The FMR measurement system of claim 1 that isconfigured in a transmission mode wherein the RF input signal from theat least one RF generator is transmitted through a first RF connector ofeach RF probe and then to the WUT through a first RF probe end or afirst transmission line, and wherein the RF microwave signal emitted bythe WUT is collected either by a second RF probe end or by the firsttransmission line of each RF probe and wherein the RF output signal isthen transmitted to a RF power diode through a second RF connector. 17.The FMR measurement system of claim 1 that is configured in areflectance mode wherein each RF probe is terminated by an open-circuitconfiguration, and wherein the RF input signal from the at least one RFgenerator is transmitted through an RF input connector of each RF probeto the WUT through a first RF probe end or transmission line, andwherein the RF microwave signal emitted by the WUT is collected by thefirst RF probe end or transmission line of each RF probe, and whereinthe RF output signal is then transmitted to a RF power diode through theRF input connector.
 18. The FMR measurement system of claim 1 furthercomprised of a Data Acquisition (DAQ) system inserted between theplurality of “n” RF diodes and the controller.
 19. The FMR measurementsystem of claim 1 wherein the magnetic assembly has a plurality of “k”magnetic poles (where k is an integer 1≤k≤m), and wherein each magneticpole is aligned above at least one of the RF probes, such that themagnetic field is applied in a direction that is orthogonal to the WUTat each of the predetermined locations.
 20. The FMR measurement systemof claim 19 wherein the applied microwave frequency is in a range of 1GHz to 100 GHz.
 21. The FMR measurement system of claim 1 wherein themagnetic assembly has a plurality of “2m” magnetic poles wherein twomagnetic poles are positioned on opposite sides of each RF probe tip,and the magnetic field is applied in an in-plane direction at each ofthe one or more predetermined locations.
 22. The FMR measurement systemof claim 21 wherein the applied microwave frequency is in a range of0.01 GHz to 100 GHz.
 23. The FMR measurement system of claim 1 whereinthe RF probes and magnetic assembly are installed in an electrical probestation.
 24. The FMR measurement system of claim 1 wherein the RF probesare attached to a probe card or mounting plate.
 25. The FMR measurementsystem of claim 1 wherein the RF probes are comprised of microstrips,striplines, coplanar waveguides, or grounded coplanar waveguides. 26.The FMR measurement system of claim 1 wherein the RF probes arecomprised of a form of printed circuit board transmission line,microcavities, coaxial waveguides, RF electrical probes, or a form of RFantenna.
 27. The FMR measurement system of claim 1 wherein the magneticassembly comprises a multi-axis vector magnet, or a superconductingmagnet.
 28. The FMR measurement system of claim 1 wherein the magneticfield is up to 3 Tesla.
 29. The FMR measurement system of claim 1wherein each RF probe contacts the one or more magnetic films ormagnetic structures, or is within about 100 microns of the one or moremagnetic films or magnetic structures.
 30. The FMR measurement system ofclaim 1 wherein one or more RF amplifiers are included between the atleast one RF generator and the device to deliver the RF input signal inorder to compensate for the loss of power induced by the device todeliver the RF input signal from the at least one RF generator to eachof the RF probes.
 31. The FMR measurement system of claim 1 wherein oneor more low noise amplifiers are used to enhance the output signal of atleast one RF power diode to improve FMR signal sensitivity.
 32. The FMRmeasurement system of claim 1 wherein the FMR condition is establishedwith each of the different microwave frequencies by sweeping themagnetic field from a minimum value to a maximum value.
 33. The FMRmeasurement system of claim 1 wherein the FMR condition is establishedby holding the magnetic field constant and sweeping with a plurality ofdifferent microwave frequencies applied in a sequential order.
 34. TheFMR measurement system of claim 1 wherein the at least one RF generatorcomprises a plurality of “p” RF generators (where p is an integer 1<p≤m)that are each configured to provide the sequence of different RF inputsignals.
 35. A method of performing a ferromagnetic resonance (FMR)measurement at a plurality of “m” predetermined locations on a wholewafer under test (WUT) having one or more magnetic films or magneticstructures formed thereon, where “m” is an integer ≥2, comprising:providing a wafer chuck or stage on which the WUT is held, and having afirst link to a controller; providing a mounting plate on which aplurality of “m” RF probes are mounted and configured to contact “m”predetermined locations of the WUT, and providing lateral and verticalmovements of the mounting plate or wafer chuck in a step and repeatfashion; providing a device to deliver RF input signals in a form ofdifferent microwave frequencies from at least one RF generator to eachof the plurality of “m” RF probes; providing a signal pathway in each ofthe plurality of “m” RF probes enabling the transmission of the RF inputsignals to the WUT at each predetermined location of the WUT; applying amagnetic field from a magnetic field source simultaneously with eachdifferent microwave frequency to establish a FMR condition at eachpredetermined location of the WUT thereby resulting in a RF outputsignal for each pair of an applied microwave frequency value and anapplied magnetic field value; transmitting the plurality of RF outputsignals to “n” RF diodes (where n is an integer 1≤n≤m), and wherein eachRF diode collects the RF output signals from one or more RF probes whenthe FMR condition occurs at each of the predetermined locations; andtransmitting the output signals from the “n” RF diodes to a computerthat manages the application of the different microwave frequencies andmagnetic field, and converts the output signals to data comprised of oneor more magnetic properties.
 36. The method of claim 35 wherein thedevice that delivers the RF input signals from the at least one RFgenerator to each of the RF probes is a RF power distribution devicethat delivers the RF input signals to all the RF probes simultaneously.37. The method of claim 35 wherein the device that delivers the RF inputsignals from the at least one RF generator to each of the RF probes is aRF power routing device that delivers the RF input signal to all RFprobes consecutively.
 38. The method of claim 35 wherein the device thatdelivers the RF input signals from the at least one RF generator to eachof the RF probes is comprised of a combination of at least one RF powerdistribution device and at least one RF power routing device.
 39. Themethod of claim 36 wherein the RF power distribution device is comprisedof a broadband RF multi-port directional coupler.
 40. The method ofclaim 36 wherein the RF power distribution device is configured with aplurality of “m” broadband RF directional couplers connected in seriessuch that each of the broadband RF directional couplers transmits a RFsignal to one of the “m” RF probes.
 41. The method of claim 36 whereinthe RF power distribution device is comprised of a broadband multi-portWilkinson power divider.
 42. The method of claim 41 wherein theWilkinson power divider has a plurality of “m” output ports such thateach output port transmits a RF signal to one of the “m” RF probes. 43.The method of claim 36 wherein the RF power distribution device has aplurality of “m” output ports such that each output port transmits a RFsignal to one of the “m” RF probes.
 44. The method of claim 36 whereinthe RF power distribution device is comprised of a plurality of RF powerdistribution devices connected in series, or in a “tree-like”configuration, or both.
 45. The method of claim 37 wherein the RF powerrouting device is comprised of an electromechanical RF switch, or asolid state RF switch with a multiplicity of outputs.
 46. The method ofclaim 37 wherein the RF power routing device has a plurality of “m”output ports such that the RF signal is distributed to each of the “m”RF probes continuously.
 47. The method of claim 37 wherein the RF powerrouting device is comprised of a plurality of electromechanical RFswitches or solid state RF switches connected in series, or in a“tree-like” configuration, or both.
 48. The method of claim 37 whereinthe RF power routing device is comprised of a plurality of RF powerrouting devices connected in series, or in a “tree-like” configuration,or both.
 49. The method of claim 37 wherein at least an additional RFpower routing device is used to route the output signal of each RF probeto the “n” RF diodes.
 50. The method of claim 35 that has a transmissionmode configuration wherein the RF input signals from the at least one RFgenerator are transmitted through a first RF connector of each RF probeto the WUT through a first RF probe end or a first transmission line,and wherein the RF microwave signals emitted by the WUT are collectedeither by a second RF probe end or by the first transmission line ofeach RF probe, and wherein the RF output signals are then transmitted toone of the plurality of “n” RF diodes through a second RF connector. 51.The method of claim 35 that has a reflectance mode configuration whereineach RF probe is terminated by an open-circuit configuration, andwherein the RF input signals from the at least one RF generator aretransmitted through an RF connector of each RF probe to the WUT througha first RF probe end or transmission line, and wherein the RF outputsignals from the WUT are collected by the first RF probe end ortransmission line of each RF probe, and wherein the RF output signalsare then transmitted to one of the plurality of “n” RF diodes throughthe RF input connector.
 52. The method of claim 35 further comprised ofa Data Acquisition (DAQ) system inserted between the plurality of “n” RFdiodes and the computer.
 53. The method of claim 35 wherein the magneticfield source has a plurality of “k” magnetic poles (where k is aninteger 1≤k≤m), and wherein each magnetic pole is aligned above at leastone of the “m” RF probes, such that the magnetic field is applied in adirection that is orthogonal to the WUT at each of the predeterminedlocations.
 54. The method of claim 53 wherein the applied microwavefrequency is in a range of 1 GHz to 100 GHz.
 55. The method of claim 35wherein the magnetic field source has a plurality of “2m” magnetic poleswherein two magnetic poles are positioned on opposite sides of each RFprobe tip, and the magnetic field is applied in an in-plane direction ateach of the one or more predetermined locations.
 56. The method of claim55 wherein the applied microwave frequency is in a range of 0.01 GHz to100 GHz.
 57. The method of claim 35 wherein the plurality of “m” RFprobes and magnetic field source are installed in an electrical probestation.
 58. The method of claim 35 wherein the plurality of “m” RFprobes is attached to a probe card or mounting plate.
 59. The method ofclaim 35 wherein the plurality of “m” RF probes is comprised ofmicrostrips, striplines, coplanar waveguides, or grounded coplanarwaveguides.
 60. The method of claim 35 wherein the plurality of “m” RFprobes is comprised of a form of printed circuit board transmissionline, microcavities, coaxial waveguides, RF electrical probes, or a formof RF antenna.
 61. The method of claim 35 wherein the magnetic fieldsource comprises a multi-axis vector magnet, or a superconductingmagnet.
 62. The method of claim 35 wherein the magnetic field is up to 3Tesla.
 63. The method of claim 35 wherein each of the plurality of “m”RF probes contacts the one or more magnetic films or magneticstructures, or is within about 100 microns of the one or more magneticfilms or magnetic structures.
 64. The method of claim 35 wherein a RFamplifier (or multiple RF amplifiers) is included between the at leastone RF generator and the device to deliver the RF input signals in orderto compensate for the loss of power induced by the device to deliver theRF input signals from the at least one RF generator to each of theplurality of “m” RF probes.
 65. The method of claim 35 wherein a lownoise amplifier (or multiple low noise amplifiers) is used to enhancethe RF output signal of at least one of the plurality of “n” RF diodesto improve FMR signal sensitivity.
 66. The method of claim 35 whereinthe FMR condition is established with each of the different microwavefrequencies by sweeping the magnetic field from a minimum value to amaximum value.
 67. The method of claim 35 wherein the FMR condition isestablished by holding the magnetic field constant and sweeping with aplurality of different microwave frequencies applied in a sequentialorder.
 68. The method of claim 35 wherein the at least one RF generatorcomprises a plurality of “p” RF generators (where p is an integer 1<p≤m)that are each configured to provide a sequence of different RF inputsignals.